Research Papers by C.J.M. van Rijn
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In this study, hydrogen selective membranes have been fabricated using microsystem technology. A 750 nm dense layer of Pd (77 wt%) and Ag (23 wt%) is deposited on a non-porous 1 mm thick silicon nitride layer by cosputtering of a Pd and a Ag target. After sputtering, openings of 5 µm are made in the
Desalination 147 (2002)
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