Research Papers by Vladimir M. Vorotyntsev

It was shown that germane high purification is possible up to sufficient for microelectronics water impurity level equaled < 0.1 ppm (< 10– %).

The possibility of high-purity fluorocarbon production was shown. The experimental results show that further investigation of the high purification is perspective and needed for getting fluorocarbons with purity no less than 99.999%.